Fabrication and characterisation of suspended narrow silicon nanowire channels for low-power nano-electro-mechanical (NEM) switch applications
نویسندگان
چکیده
منابع مشابه
Nano-Electro-Mechanical (NEM) Relay Devices and Technology for Ultra-Low Energy Digital Integrated Circuits
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ژورنال
عنوان ژورنال: Microelectronic Engineering
سال: 2015
ISSN: 0167-9317
DOI: 10.1016/j.mee.2015.02.047